| KE | Process Modification, Unit Modification |
|---|---|
| Re-Location | |
| PLC program Change | |
| Parameter Modification Or Copy | |
| Ladder Program Modification | |
| Soft GFC Making | |
| TEL | Process Modification(150,200mm) |
| De-Installation(300mm) | |
| Re-Location | |
| Parameter Modification Or Copy | |
| GFC Panel Modification |